Enhanced resolution of poly(methyl methacrylate) electron resist by thermal processing

Arjmandi, NimaNimaArjmandiLagae, LiesbetLiesbetLagaeBorghs, GustaafGustaafBorghs2021-10-172021-10-1720091071-1023https://imec-publications.be/handle/20.500.12860/14905Enhanced resolution of poly(methyl methacrylate) electron resist by thermal processingJournal articlehttp://scitation.aip.org/jvstb/