Growth and characterization of DH-HEMT structures with various AlGaN barriers and AlN interlayers on 200mm Si(111) substrates

Zhao, MingMingZhaoSaripalli, YogaYogaSaripalliKandaswamy, Prem KumarPrem KumarKandaswamyLiang, HuHuLiangFirrincieli, AndreaAndreaFirrincieliDecoutere, StefaanStefaanDecoutereVancoille, EricEricVancoille2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23450Growth and characterization of DH-HEMT structures with various AlGaN barriers and AlN interlayers on 200mm Si(111) substratesMeeting abstract