Koelling, SebastianSebastianKoellingGilbert, MatthieuMatthieuGilbertVandervorst, WilfriedWilfriedVandervorst2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15617Quantitative depth profiling of SiGe-multilayers with the atomprobeMeeting abstract