Growth inhibition of metal oxide ALD on advanced patterning film (APF) for tone reversal of HfO2 and TiO2 patterned structures

Stevens, EricEricStevensTomczak, YoannYoannTomczakChan, BTBTChanAltamirano Sanchez, EfrainEfrainAltamirano SanchezDelabie, AnneliesAnneliesDelabieParsons, GregoryGregoryParsons2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29506Growth inhibition of metal oxide ALD on advanced patterning film (APF) for tone reversal of HfO2 and TiO2 patterned structuresProceedings paperhttps://www.researchgate.net/publication/318561942_Growth_Inhibition_of_Metal_Oxide_ALD_on_Advanced_Patterning_Film_APF_for_Tone