Quantum efficiency and dark current evaluation of a backside illuminated CMOS image sensor

Vereecke, BartBartVereeckeCavaco, CelsoCelsoCavacoDe Munck, KoenKoenDe MunckHaspeslagh, LucLucHaspeslaghMinoglou, KikiKikiMinoglouMoore, GeorgeGeorgeMooreSabuncuoglu Tezcan, DenizDenizSabuncuoglu TezcanTack, KlaasKlaasTackWu, BobBobWuOsman, HarisHarisOsman2021-10-232021-10-2320150021-4922https://imec-publications.be/handle/20.500.12860/26126Quantum efficiency and dark current evaluation of a backside illuminated CMOS image sensorJournal article10.7567/JJAP.54.04DE09http://iopscience.iop.org/article/10.7567/JJAP.54.04DE09/meta