La Grappe, AlexandreAlexandreLa GrappeVisker, EvertEvertViskerRedolfi, AugustoAugustoRedolfiPeng, LanLanPengMuga, KarthikKarthikMugaHuls, DavidDavidHulsVanhaelemeersch, SergeSergeVanhaelemeerschLauwers, AnneAnneLauwersAckaert, JanJanAckaert2022-03-162022-03-1620210569-5503WOS:000702282700124https://imec-publications.be/handle/20.500.12860/39459A novel integration scheme for wafer singulation and selective processing using temporary dry film resistProceedings paper10.1109/ECTC32696.2021.00136978-0-7381-4523-5WOS:000702282700124