Vlekken, J.J.VlekkenWu, Ting-DiTing-DiWuD'Olieslaeger, MarcMarcD'OlieslaegerKnuyt, G.G.KnuytVandervorst, WilfriedWilfriedVandervorstDe Schepper, PatrickPatrickDe Schepper2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2296Monte Carlo simulation of the formation of M2-+ molecular ions sputtered from metallic materialsOral presentation