Satta, AlessandraAlessandraSattaBrongersma, SywertSywertBrongersmaSchuhmacher, JörgJörgSchuhmacherConard, ThierryThierryConardBeyer, GeraldGeraldBeyerMaex, KarenKarenMaexViitanen, M.M.M.M.ViitanenBrongersma, H.H.H.H.BrongersmaBesling, W.W.BeslingKilpela, OlliOlliKilpelaSprey, HesselHesselSpreyVantomme, AndreAndreVantomme2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6790Nucleation and growth of TiN films deposited by atomic layer depositionProceedings paper