Su, JialeJialeSuGoedbloed, MartijnMartijnGoedbloedvan Andel, YvonneYvonnevan AndelLeonov, VladimirVladimirLeonovWang, ZiyangZiyangWangVullers, RuudRuudVullers2021-10-182021-10-182009-12https://imec-publications.be/handle/20.500.12860/16278Micromachined thermoelectric energy harvester fabrication on 6-inch wafer and characterizationProceedings paper