Integration of HIMOSTM flash memory in a 90nm CMOS technology

De Vos, JoeriJoeriDe VosHaspeslagh, LucLucHaspeslaghDemand, MarcMarcDemandRedolfi, AugustoAugustoRedolfiBaerts, ChristinaChristinaBaertsBeckx, StephanStephanBeckxVleugels, FrankFrankVleugelsVan Houdt, JanJanVan Houdt2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10332Integration of HIMOSTM flash memory in a 90nm CMOS technologyProceedings paper