Actinic photoemission spectroscopy of litho materials using a table-top ultrafast EUV source

Singh, DhirendraDhirendraSinghDorney, KevinKevinDorneyHolzmeier, FabianFabianHolzmeierWitting Larsen, EsbenEsbenWitting LarsenGalleni, LauraLauraGalleniMokhtarzadeh, CharlesCharlesMokhtarzadehvan Setten, MichielMichielvan SettenConard, ThierryThierryConardPetersen, JohnJohnPetersenvan der Heide, PaulPaulvan der Heide2024-08-192024-06-152024-08-192024978-1-5106-7216-10277-786XWOS:001224296200001https://imec-publications.be/handle/20.500.12860/44041Actinic photoemission spectroscopy of litho materials using a table-top ultrafast EUV sourceProceedings paper10.1117/12.3010751978-1-5106-7217-8WOS:001224296200001