3D interconnect technology for out-of-plane biomedical probe arrays: a modular approach with slim-base solutions

Aarts, ArnoArnoAarts2021-10-192021-10-192011-01https://imec-publications.be/handle/20.500.12860/184363D interconnect technology for out-of-plane biomedical probe arrays: a modular approach with slim-base solutionsPHD thesis