Jonckheere, RikRikJonckheereVan Den Heuvel, DieterDieterVan Den HeuvelLamantia, MatthewMatthewLamantiaBaudemprez, BartBartBaudemprezHendrickx, EricEricHendrickxRonse, KurtKurtRonse2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17326EUV mask defectivity: status and mitigation towards HVMProceedings paper