A comparison of positive- and negative tone contact hole process flows using the IMEC NXE 3100

Younkin, ToddToddYounkinWinroth, GustafGustafWinrothGronheid, RoelRoelGronheid2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21898A comparison of positive- and negative tone contact hole process flows using the IMEC NXE 3100Proceedings paper