Innovative electro-structural integration approach defining large-area PMUT on TFT backplane for ultrasound imaging systems

Gijsenbergh, PieterPieterGijsenberghMalainou, AntoniaAntoniaMalainouWysocka, DominikaDominikaWysockaUkropec, RobertRobertUkropecStoppato, AlessandroAlessandroStoppatoShen, ZhiyuanZhiyuanShenDe Roose, FlorianFlorianDe RooseAppeltans, RafRafAppeltansRochus, VeroniqueVeroniqueRochusRottenberg, XavierXavierRottenberg2025-05-082025-04-032025-05-082024979-8-3503-7191-81099-4734WOS:001428150100419https://imec-publications.be/handle/20.500.12860/45486Innovative electro-structural integration approach defining large-area PMUT on TFT backplane for ultrasound imaging systemsProceedings paper10.1109/UFFC-JS60046.2024.10793958979-8-3503-7190-1WOS:001428150100419