Advanced silicon integration technologies for Lab-on-Chip and implantable device applications

Van Hoof, ChrisChrisVan HoofOp de Beeck, MaaikeMaaikeOp de Beeck2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18190Advanced silicon integration technologies for Lab-on-Chip and implantable device applicationsProceedings paper