Improved intrinsic Q of silicon-on-insulator microring resonators using TM-polarized light

De Heyn, PeterPeterDe HeynKuyken, BartBartKuykenVermeulen, DiedrikDiedrikVermeulenBogaerts, WimWimBogaertsVan Thourhout, DriesDriesVan Thourhout2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16945Improved intrinsic Q of silicon-on-insulator microring resonators using TM-polarized lightProceedings paper