A ballistic electron emission microscopy (BEEM) study of the barrier height change of Au/n-GaAs Schottky barriers due to reactive ion etching

Vanalme, G. M.G. M.VanalmeVan Meirhaeghe, R. L.R. L.Van MeirhaegheCardon, F.F.CardonVan Daele, PeterPeterVan Daele2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2260A ballistic electron emission microscopy (BEEM) study of the barrier height change of Au/n-GaAs Schottky barriers due to reactive ion etchingJournal article