Boccardi, GuillaumeGuillaumeBoccardiRitzenthaler, RomainRomainRitzenthalerTogo, MitsuhiroMitsuhiroTogoChiarella, ThomasThomasChiarellaKim, Min-SooMin-SooKimSasaki, YuichiroYuichiroSasakiVeloso, AnabelaAnabelaVelosoChew, Soon AikSoon AikChewVecchio, EmmaEmmaVecchioLocorotondo, SabrinaSabrinaLocorotondoDevriendt, KatiaKatiaDevriendtOng, PatrickPatrickOngBrus, StephanStephanBrusHoriguchi, NaotoNaotoHoriguchiThean, AaronAaronThean2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20371RMG Technology Integration in FinFET DevicesProceedings paper