Verhaegen, KatarinaKatarinaVerhaegenBaert, KrisKrisBaertSimaels, J.J.SimaelsVan Driessche, W.W.Van Driessche2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/4001A high-throughput silicon microphysiometerProceedings paper