Solid phase epitaxy of amorphous Ge on Si in N2 atmosphere

Lieten, RubenRubenLietenDegroote, StefanStefanDegrooteLeys, MaartenMaartenLeysPosthuma, NielsNielsPosthumaBorghs, GustaafGustaafBorghs2021-10-182021-10-1820090003-6951https://imec-publications.be/handle/20.500.12860/15718Solid phase epitaxy of amorphous Ge on Si in N2 atmosphereJournal articlehttp://dx.doi.org/10.1063/1.3098075