Wan, DannyDannyWanSwerts, JohanJohanSwertsSouriau, LaurentLaurentSouriauBurnett, JonathanJonathanBurnettPiao, XiaoyuXiaoyuPiaoMongillo, MassimoMassimoMongilloVerjauw, JeroenJeroenVerjauwPotocnik, AntonAntonPotocnikThiam, ArameArameThiamJussot, JulienJulienJussotVangoidsenhoven, DizianaDizianaVangoidsenhovenPacco, AntoineAntoinePaccoKudra, MarinaMarinaKudraNiepce, DavidDavidNiepceIvanov, TsvetanTsvetanIvanovBoccardi, GuillaumeGuillaumeBoccardiMocuta, DanDanMocutaBylander, JonasJonasBylanderRadu, IulianaIulianaRadu2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/34417Fabrication of superconducting resonators in a 300 mm pilot line for quantum technologiesMeeting abstracthttps://iitc-conference.org/2019-iitc-mam-program/