Glinsner, ThomasThomasGlinsnerEibelhuber, MartinMartinEibelhuberTreiblmayr, DominikDominikTreiblmayrSchamberger, BarbaraBarbaraSchambergerChouiki, M.M.ChouikiLenk, ClaudiaClaudiaLenkKrivoshapkina, Y.Y.KrivoshapkinaHoffmann, M.M.HoffmannLenk, SteveSteveLenkRangelow, IvoIvoRangelowChan, BTBTChande Marneffe, Jean-FrancoisJean-Francoisde Marneffe2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28402Wafer-level nanoimprint lithography for single electron transistorsMeeting abstract