On the defect generation and low voltage extrapolation of QBD in SiO2/HfO2 stacks

Degraeve, RobinRobinDegraeveCrupi, F.F.CrupiKwak, Dong HwaDong HwaKwakGroeseneken, GuidoGuidoGroeseneken2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8817On the defect generation and low voltage extrapolation of QBD in SiO2/HfO2 stacksProceedings paper