Oil as an Enabler for Efficient Materials Removal in Three-Dimensional Scanning Probe Microscopy Applications

Noel, CelineCelineNoelWouters, LennaertLennaertWoutersParedis, KristofKristofParedisCelano, UmbertoUmbertoCelanoHantschel, ThomasThomasHantschel2022-09-272022-01-112022-09-152022-09-272021-122297-3079WOS:000739013600001https://imec-publications.be/handle/20.500.12860/38731Oil as an Enabler for Efficient Materials Removal in Three-Dimensional Scanning Probe Microscopy ApplicationsJournal article10.3389/fmech.2021.797962WOS:000739013600001atomic force microscopySPMoilnanotomographydiamond tipdebris removalscalpel SPM