Self focusing SIMS: probing thin film composition in very confined volumes

Franquet, AlexisAlexisFranquetDouhard, BastienBastienDouhardMelkonyan, DavitDavitMelkonyanFavia, PaolaPaolaFaviaConard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorst2021-10-232021-10-2320160169-4332https://imec-publications.be/handle/20.500.12860/26636Self focusing SIMS: probing thin film composition in very confined volumesJournal articlehttp://www.sciencedirect.com/science/article/pii/S0169433216000829