Arjmandi, NimaNimaArjmandiStakenborg, TimTimStakenborgBorghs, GustaafGustaafBorghsLagae, LiesbetLiesbetLagae2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/14906Sub-5nm electron beam lithographyMeeting abstracthttp://www.mne09.org/