Elemental mapping of sub-μm particles and structures by laser-SNMS and TOF-SIMS

Kollmer, F.F.KollmerKamischke, R.R.KamischkeOstendorf, R.R.OstendorfBender, HugoHugoBenderBenninghoven, A.A.Benninghoven2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4490Elemental mapping of sub-μm particles and structures by laser-SNMS and TOF-SIMSOral presentation