Cotrin Teixeira, RicardoRicardoCotrin TeixeiraDe Munck, KoenKoenDe MunckBaert, KrisKrisBaertSwinnen, BartBartSwinnenKnüttel, AlexsanderAlexsanderKnüttelDe Moor, PietPietDe Moor2021-10-162021-10-162007-12https://imec-publications.be/handle/20.500.12860/11906Thickness characterization of ultra thin wafers on carrierProceedings paper