Low temperature formation of emitter and BSF by rapid thermal Co-diffusion of P, Al or B

Hartiti, B.B.HartitiSivoththaman, SivanarayanamoorthySivanarayanamoorthySivoththamanSchindler, R.R.SchindlerNijs, JohanJohanNijsMuller, J. C.J. C.MullerSiffert, P.P.Siffert2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/186Low temperature formation of emitter and BSF by rapid thermal Co-diffusion of P, Al or BProceedings paper