Armini, SilviaSilviaArminiDe Messemaeker, JokeJokeDe MessemaekerBurtovyy, RuslanRuslanBurtovyyLuzinov, IgorIgorLuzinovWhelan, CarolineCarolineWhelanMoinpour, MansourMansourMoinpourMaex, KarenKarenMaex2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11653Composite polymer core – ceria shell abrasive particles during silicon oxide CMPProceedings paper