Zhao, ChaoChaoZhaoRichard, OlivierOlivierRichardYoung, EdwardEdwardYoungBender, HugoHugoBenderRoebben, G.G.RoebbenHaukka, S.S.HaukkaDe Gendt, StefanStefanDe GendtHoussa, MichelMichelHoussaCarter, RichardRichardCarterTsai, WilmanWilmanTsaiVan Ber Biest, O.O.Van Ber BiestHeyns, MarcMarcHeyns2021-10-152021-10-152002https://imec-publications.be/handle/20.500.12860/7100Thermostability of amorphous zirconium aluminate high-K layersJournal article