Shi, XiaopingXiaopingShiKurstjens, RufiRufiKurstjensVos, IngridIngridVosEveraert, Jean-LucJean-LucEveraertSchaekers, MarcMarcSchaekers2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19769Review of silicon nanowire oxidationProceedings paperhttp://www.ecsdl.org/getpdf/servlet/GetPDFServlet?filetype=pdf&id=ECSTF8000034000001000535000001&idtype=cvips&prog=normal