De Vos, JoeriJoeriDe VosBogaerts, LieveLieveBogaertsBuisson, ThibaultThibaultBuissonGerets, CarineCarineGeretsJamieson, GeraldineGeraldineJamiesonVandersmissen, KevinKevinVandersmissenLa Manna, AntonioAntonioLa MannaBeyne, EricEricBeyne2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22227Key elements for sub-50μm pitch micro bump processesProceedings paper