De Moor, PietPietDe MoorBaert, KrisKrisBaertBeyne, EricEricBeyneDe Wolf, IngridIngridDe WolfTilmans, HarrieHarrieTilmansVan Hoof, ChrisChrisVan Hoof2021-10-152021-10-152004-04https://imec-publications.be/handle/20.500.12860/8777Low temperature zero-level packaging of MEMSProceedings paper