Contact resistance modeling for NEMS ohmic relays using highly doped SiGe contact

Ramezani, MalihehMalihehRamezaniSeveri, SimoneSimoneSeveriTamaddon, Amir-HosseinAmir-HosseinTamaddonVanstreels, KrisKrisVanstreelsTilmans, HarrieHarrieTilmansRottenberg, XavierXavierRottenbergDe Meyer, KristinKristinDe MeyerWitvrouw, AnnAnnWitvrouw2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22980Contact resistance modeling for NEMS ohmic relays using highly doped SiGe contactProceedings paper