Vandervorst, WilfriedWilfriedVandervorstSchulze, AndreasAndreasSchulzeKambham, Ajay KumarAjay KumarKambhamMody, JayJayModyGilbert, MatthieuMatthieuGilbertEyben, PierrePierreEyben2021-10-222021-10-2220141610-1634https://imec-publications.be/handle/20.500.12860/24727Dopant/carrier profiling for 3D-structuresJournal articlehttp://onlinelibrary.wiley.com/doi/10.1002/pssc.201300329/abstract