RTA-preparation of b-FeSi2 layers from MBE-grown FeSi films deposited on SiGe(100) substrates

Libezny, MilanMilanLibeznyPoortmans, JefJefPoortmansDekoster, J.J.DekosterDegroote, S.S.DegrooteVantomme, AndreAndreVantommede Lange, B. G. M.B. G. M.de LangeLangouche, G.G.LangoucheNijs, JohanJohanNijs2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/726RTA-preparation of b-FeSi2 layers from MBE-grown FeSi films deposited on SiGe(100) substratesProceedings paper