Fabrication and replication of high efficiency blazed gratings with grayscale electron beam lithography and UV nanoimprint lithography

Mattelin, MarieMarieMattelinRadosavljevic, AnaAnaRadosavljevicMissinne, JeroenJeroenMissinneCuypers, DieterDieterCuypersKommeren, SanderSanderKommerenVandael, JosJosVandaelter Meulen, Jan MatthijsJan Matthijster MeulenVerduyckt, LucLucVerduycktVan Steenberge, GeertGeertVan Steenberge2021-10-292021-10-292020https://imec-publications.be/handle/20.500.12860/35562Fabrication and replication of high efficiency blazed gratings with grayscale electron beam lithography and UV nanoimprint lithographyProceedings paperhttps://doi.org/10.1117/12.2542171