Tamaddon, Amir-HosseinAmir-HosseinTamaddonMertens, PaulPaulMertensVermant, JanJanVermantVereecke, GuyGuyVereeckeHolsteyns, FrankFrankHolsteynsHeyns, MarcMarcHeynsDe Gendt, StefanStefanDe Gendt2021-10-222021-10-2220142162-8769https://imec-publications.be/handle/20.500.12860/24591Role of ambient composition on the formation and shape of watermarks on a bare silicon substrateJournal articleRole of ambient composition on the formation and shape of watermarks on a bare silicon substrate