Photonic nanostructures for advanced light trapping in silicon solar cells: the impact of etching on the material electronic quality

Trompoukis, ChristosChristosTrompoukisStesmans, AndreAndreStesmansSimoen, EddyEddySimoenDepauw, ValerieValerieDepauwEl Daif, OunsiOunsiEl DaifLee, KidongKidongLeeGordon, IvanIvanGordonMertens, RobertRobertMertensPoortmans, JefJefPoortmans2021-10-232021-10-2320161862-6254https://imec-publications.be/handle/20.500.12860/27404Photonic nanostructures for advanced light trapping in silicon solar cells: the impact of etching on the material electronic qualityJournal article10.1002/pssr.201510394