Mirabelli, GioeleGioeleMirabelliWang, JaneJaneWangTrivkovic, DarkoDarkoTrivkovicWeckx, PieterPieterWeckxSpessot, AlessioAlessioSpessotRonse, KurtKurtRonseKim, Ryan Ryoung hanRyan Ryoung hanKimHellings, GeertGeertHellingsRyckaert, JulienJulienRyckaert2022-07-012022-05-222022-05-302022-06-212022-06-232022-07-012021978-1-5106-4552-30277-786XWOS:000792657300007https://imec-publications.be/handle/20.500.12860/39864Analysis of advanced technology nodes and h-NA EUV introduction: a cost perspectiveProceedings paper10.1117/12.2600804978-1-5106-4553-0WOS:000792657300007