Insight on the characterization of MoS2 based devices and requirements for logic device integration

Lockhart de la Rosa, Cesar JavierCesar JavierLockhart de la RosaArutchelvan, GouthamGouthamArutchelvanRadu, IulianaIulianaRaduLin, DennisDennisLinHuyghebaert, CedricCedricHuyghebaertHeyns, MarcMarcHeynsDe Gendt, StefanStefanDe Gendt2021-10-232021-10-2320162162-8769https://imec-publications.be/handle/20.500.12860/26922Insight on the characterization of MoS2 based devices and requirements for logic device integrationJournal articlehttp://jss.ecsdl.org/content/5/11/Q3072.abstract?etoc