Advanced carrier depth profiling on Si and Ge with micro four-point probe

Clarysse, TrudoTrudoClarysseEyben, PierrePierreEybenParmentier, BrigitteBrigitteParmentierVan Daele, BennyBennyVan DaeleSatta, AlessandraAlessandraSattaVandervorst, WilfriedWilfriedVandervorstLin, RongRongLinPetersen, Dirch H.Dirch H.PetersenFolmer Nielsen, PeterPeterFolmer Nielsen2021-10-172021-10-1720081071-1023https://imec-publications.be/handle/20.500.12860/13541Advanced carrier depth profiling on Si and Ge with micro four-point probeJournal article