Agarwal Kumar, TarunTarunAgarwal KumarYakimets, DmitryDmitryYakimetsRaghavan, PraveenPraveenRaghavanRadu, IulianaIulianaRaduThean, AaronAaronTheanHeyns, MarcMarcHeynsDehaene, WimWimDehaene2021-10-222021-10-2220150018-9383https://imec-publications.be/handle/20.500.12860/24918Benchmarking of MoS2 FETs with multigate Si-FET options for 5 nm and beyondJournal articlehttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7312439