Analysis of the nonlinear behavior of a MEMS variable capacitor

Innocent, ManuelManuelInnocentWambacq, PietPietWambacqDonnay, StephaneStephaneDonnayTilmans, HarrieHarrieTilmansEngels, MarcMarcEngelsDe Man, HugoHugoDe ManSansen, WillyWillySansen2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6423Analysis of the nonlinear behavior of a MEMS variable capacitorProceedings paper