Assessment of Ge1-xSnx alloys for strained Ge CMOS devices

Takeuchi, S.S.TakeuchiShimura, Y.Y.ShimuraNishimura, T.T.NishimuraVincent, BenjaminBenjaminVincentEneman, GeertGeertEnemanClarysse, TrudoTrudoClarysseDemeulemeester, J.J.DemeulemeesterTemst, K.K.TemstVantomme, AndreAndreVantommeDekoster, JohanJohanDekosterCaymax, MattyMattyCaymaxLoo, RogerRogerLooNakatsuka, O.O.NakatsukaSakai, A.A.SakaiZaima, S.S.Zaima2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18062Assessment of Ge1-xSnx alloys for strained Ge CMOS devicesMeeting abstract