Flannery, C.M.C.M.FlanneryMurray, C.C.MurrayBaklanov, MikhaïlMikhaïlBaklanovStreiter, I.I.StreiterSchultz, S.E>S.E>Schultz2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6326Thin-film aerogel porosity and stiffness characterized by surface acoustic wave spectroscopyProceedings paper