Robustness of electrostatic MEMS actuators against electrical overstress

De Coster, JeroenJeroenDe CosterRottenberg, XavierXavierRottenbergSangameswaran, SandeepSandeepSangameswaranEkkels, PhillipPhillipEkkelsTilmans, HarrieHarrieTilmansDe Wolf, IngridIngridDe Wolf2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15165Robustness of electrostatic MEMS actuators against electrical overstressProceedings paper