Kostermans, MaartenMaartenKostermansBrouri, MohandMohandBrouriBaier, UlrichUlrichBaierVertommen, JohanJohanVertommenPageau, ArnaudArnaudPageauBoullart, WernerWernerBoullart2021-10-192021-10-192011-11https://imec-publications.be/handle/20.500.12860/19196Exploring high aspEct ratio 2μm TSV (25:1)Proceedings paperhttp://meetings.aps.org/Meeting/GEC11/Event/151471